| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8401bd1a86a10d5508942a53475fc38 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0789 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-2086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-027 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-24 |
| filingDate |
2014-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba88f45ed8b516b71dd73178bd131895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_217fd2dbe27cf853d70732db5a5696d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12f28a0a802afffd118963e211a446d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87e92ce962775c03bf6a870d70840c5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c8aaab998f83b30d6c6ba25cfdd6f70 |
| publicationDate |
2019-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3049549-B1 |
| titleOfInvention |
Method for treatment of recessed structures in dielectric materials for smear removal |
| priorityDate |
2013-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |