| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98a75c9fff239084cf3c988c59841957 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2015-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_064caeab32e5cfe902568cf8c3eae098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92f099e8f892654eb58bf2ce65804b14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_222411a00e1067f1d0ec592730a46250 |
| publicationDate |
2021-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3040397-B1 |
| titleOfInvention |
Etchant solutions and method of use thereof |
| priorityDate |
2014-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |