http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3029524-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10 |
| filingDate | 2014-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24b48c50c79f702db91f75cdb7bb66ef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbdae697df2ea8f34a395e20f6b520a1 |
| publicationDate | 2016-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-3029524-A1 |
| titleOfInvention | Radiation-sensitive resin composition, resist pattern formation method, polymer, and compound |
| abstract | A radiation-sensitive resin composition is provided containing a first polymer having a first structural unit represented by the following formula (1), and a radiation-sensitive acid generator. In the following formula (1), Z 1 to Z 4 each independently represent a hydrogen atom, a fluorine atom, a monovalent hydrocarbon group, a monovalent fluorinated hydrocarbon group, or a monovalent group that contains a hetero atom having a valency of no less than 2; R 3 represents a monovalent hydrocarbon group or a monovalent fluorinated hydrocarbon group, wherein at least any one of Z 1 , Z 2 and R 3 contains a fluorine atom, and wherein at least any one of Z 1 to Z 4 , the ring structure (a) and the ring structure (b) contains a hetero atom having a valency of no less than 2. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10866514-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9790166-B2 |
| priorityDate | 2013-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 544.