| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8c70cc66c25854f28ea8816284cd8f9e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-212 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-65 |
| filingDate |
2014-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_906cc945be88073219c5ee3acd78ca38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_072ba9a050a02fbaa4d798dac308d646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5929486b5cbfcd0e17fce0fe7aece9f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73f3f13dd98f051b55da0e9e1ad991f8 |
| publicationDate |
2018-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3026422-B1 |
| titleOfInvention |
An apparatus and a method for spectroscopic ellipsometry, in particular infrared spectroscopic ellipsometry |
| priorityDate |
2014-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |