| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_099413ae0cf5a2b6398b5151766cd260 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-8445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2015-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1eb44afea6764fad6f6e09ba1693cff2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc5d073a23ea840a03436fbf387becbd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94bf69b3a5017d8d6d2cd62620ad5d53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eece166188f1ec89b7215dc1da094d34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbde4b371ea4a6cc578495da41d148a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3208a8b72306eca753e498630e8b758
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ece8ffc425a7c1d4dc55c53c54d623bc |
| publicationDate |
2016-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3021375-A1 |
| titleOfInvention |
Display device and apparatus and method for manufacturing the same |
| abstract |
A display device and an apparatus and method for manufacturing the same are disclosed. The display device includes: a substrate; a display unit formed on the substrate; and an inorganic layer formed on the display unit, wherein a water vapor transmission rate (WVTR) of the inorganic layer is 5x10 -5 g/m 2 day or less. The apparatus for manufacturing a display device includes: a chamber; a shower head for spraying a mixed gas into the chamber; a plasma generation unit for forming plasma from the mixed gas; a susceptor facing the shower head and on which a substrate is seated; and a power supply unit electrically connected to the plasma generation unit, wherein a frequency of a current supplied from the power supply unit to the plasma generation unit is between about 27 MHz and about 42 MHz. |
| priorityDate |
2014-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |