| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-006 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26506
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate |
2014-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29fabcbbe0c6cf9a5a40b93b0cb0ea3f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ac9f4608cfc17fd1ea851605a075c48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_117dddef92e1b987be801324ddd50e22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6de48cc8c6099c875a289fae7e0fd81b |
| publicationDate |
2016-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3000123-A1 |
| titleOfInvention |
Enriched silicon precursor compositions and apparatus and processes for utilizing same |
| abstract |
Isotopically enriched silicon precursor compositions are disclosed, as useful in ion implantation to enhance performance of the ion implantation system, in relation to corresponding ion implantation lacking such isotopic enrichment of the silicon precursor composition. The silicon dopant composition includes at least one silicon compound that is isotopically enriched above natural abundance in at least one of Si, Si, and Si, and may include a supplemental gas including at least one of a co-species gas and a diluent gas. Dopant gas supply apparatus for providing such silicon dopant compositions to an ion implanter are described, as well as ion implantation systems including such dopant gas supply apparatus. |
| priorityDate |
2013-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |