Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_973fd4b8b31ba49ee9967003534e1eb0 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3281 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-365 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-364 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-361 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-26 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
filingDate |
2014-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2021-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_128c39ae18f2eef3b514bddc81fc96cb |
publicationDate |
2021-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-2971248-B1 |
titleOfInvention |
Aqueous cleaning composition for post copper chemical mechanical planarization |
priorityDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |