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filingDate 2014-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2015-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-2952939-A1
titleOfInvention Method for producing infrared radiation reflecting film
abstract The method for manufacturing an infrared reflecting film comprises, in order: a metal layer forming step of depositing a metal layer (25) on a transparent film substrate (10); a metal oxide layer forming step of depositing a surface-side metal oxide layer (22) by DC sputtering on the metal layer (25) so as to be in direct contact with the metal layer (25); and a transparent protective layer forming step of depositing a transparent protective layer (30) on the surface-side metal oxide layer (22). In the metal oxide layer forming step, a sputtering target used for DC sputtering contains zinc atoms and tin atoms, and is preferably formed by sintering a metal powder and at least one metal oxide among zinc oxide and tin oxide. In the surface-side metal oxide layer forming step, an inert gas and an oxygen gas are introduced into a sputtering chamber. The oxygen concentration in the gas introduced to the sputtering chamber is preferably not more than 8 vol%.
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