| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f244e1f7ea7f2ae34c1d80b70aa09aeb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D129-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D125-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D165-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2013-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df9f0fb1db54fc14ca7a40cdb3b24754
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a91cdd93555421760cd6723b0b187b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b710d8ee8017b2efa58f2a8c337525f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_213d3dee859f05a5581481fe400ef55d |
| publicationDate |
2015-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2933682-A1 |
| titleOfInvention |
Composition for forming overlay film, and resist pattern formation method using same |
| abstract |
[Object] To provide a composition for forming a topcoat layer enabling to produce a pattern excellent in roughness and in pattern shape; and also to provide a pattern formation method employing that. [Means for solving] A composition for forming a topcoat layer, comprising a solvent and a fullerene derivative having a hydrophilic group; and also a method of forming a pattern by casting the above composition on a resist surface and then by subjecting it to exposure and development. [Selected drawing] None |
| priorityDate |
2012-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |