| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_087bed7abab91ae0f927879f9fe8b273 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0714
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-1401 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-387
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2013-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a10105fa3ed33f42c63a47c897daf806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cde76b137326f4616ae19973ef7f828 |
| publicationDate |
2015-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2932526-A1 |
| titleOfInvention |
Fabrication of three-dimensional high surface area electrodes |
| abstract |
A method for fabricating three dimensional high surface electrodes is described. The methods including the steps: designing the pillars; selecting a material for the formation of the pillars; patterning the material; transferring the pattern to form the pillars; insulating the pillars and providing a metal layer for increased conductivity. Alternative methods for fabrication of the electrodes and fabrication of the electrodes using CMOS are also described. |
| priorityDate |
2012-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |