| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a33617440ad6b5b6f26ad01dad88b53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d0a3d10ed9477633fd2c07c6da61dc49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f530fdd5996dd64a4907bddf8ae15f9b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-868
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66712
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7802 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0634
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-261 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-739
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-868
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate |
2012-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_191964754c3a3dfaf63d94f20fc83148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9046953c8c2efea0419c16258bc8e780
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_992b766c8aa6a87d7f6f551d419232eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf1c8d3fc50f74771ad4dc3556d27c06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d06491a5e683d53017e79bb95320b4dc |
| publicationDate |
2015-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2930739-A1 |
| titleOfInvention |
Super-junction manufacturing method |
| abstract |
Provided is a super-junction manufacturing method, comprising: providing a lightly doped substrate (S11); employing a transmutation doping process to form a P-type heavily doped region (S12) or an N-type heavily doped region (S13); and performing annealing treatment (S14); or providing a first-type heavily doped substrate; employing the transmutation doping process to form a second-type heavily doped region; and performing annealing treatment. Thereby, the manufacturing process is simplified, and production costs are reduced. |
| priorityDate |
2012-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |