| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04C2270-0421 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T5-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0008 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2013-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4273d0a6535a3add610ed354ae7647bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b1ad87b28f9b8ce43b4c3dcc2199b45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22a5c61f157b0f4a56ebd7a78b953447
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21aa3855c007b7ba5a4bb6fdf7918d2a |
| publicationDate |
2015-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2917861-A1 |
| titleOfInvention |
Unbiased wafer defect samples |
| abstract |
Methods and systems for generating unbiased wafer defect samples are provided. One method includes selecting the defects detected by each of multiple scans performed on a wafer that have the most diversity in one or more defect attributes such that a diverse set of defects are selected across each scan. In addition, the method may include selecting the defects such that any defect that is selected and is common to two or more of the scans is not selected twice and any defects that are selected are diverse with respect to the common, selected defect. Furthermore, no sampling, binning, or classifying of the defects may be performed prior to selection of the defects such that the sampled defects are unbiased by any sampling, binning, or classifying method. |
| priorityDate |
2012-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |