| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-001 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00 |
| filingDate |
2013-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96fb52b539bee1f646931c019e39e32c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b00719b089edb7910653ca219be0a9a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1274d823db6538842a15bc08e9c73430
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_522a5c4d6259f94072f3d21c83cfdbeb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c023e6edb7a3d35ac192025b701a1e53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12531b65601a7db3c4b5f326679296ed |
| publicationDate |
2015-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2917721-A1 |
| titleOfInvention |
Method and system for mixed mode wafer inspection |
| abstract |
Mixed-mode includes receiving inspection results including one or more images of a selected region of the wafer, the one or more images include one or more wafer die including a set of repeating blocks, the set of repeating blocks a set of repeating cells. In addition, mixed-mode inspection includes adjusting a pixel size of the one or more images to map each cell, block and die to an integer number of pixels. Further, mixed-mode inspection includes comparing a first wafer die to a second wafer die to identify an occurrence of one or more defects in the first or second wafer die, comparing a first block to a second block to identify an occurrence of one or more defects in the first or second blocks and comparing a first cell to a second cell to identify an occurrence of one or more defects in the first or second cells. |
| priorityDate |
2012-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |