http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2915897-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0ea3a1237a720c2862703b2d50adec85 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-542 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-246 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-26 |
| filingDate | 2015-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_489264dcbf878c991ec37c8bb658a0e9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0da33082cbb71c7ccfbe368f9ff0c6c5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b3bdc74967f62dce0db8131fa1a1486 |
| publicationDate | 2015-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2915897-A1 |
| titleOfInvention | Method for refilling an evaporation cell |
| abstract | The present invention relates to a method of reloading an evaporation cell (10) for evaporating a material (7) on a substrate placed in a vacuum deposition chamber, a first crucible (110) containing the material to be evaporated being engaged with an evaporation chamber (100) of the evaporation cell, and evaporation means (101, 131, 132) being provided to bring the first crucible into evaporation conditions to generate a vapor flow (116). ) of the material.n n n This recharging process comprises a step of loading a second crucible (120) containing the material to be evaporated in a charging chamber (200) previously isolated from the adjoining evaporation chamber, the pressure in the charging chamber then being substantially greater than that in the vacuum deposition chamber; a confinement step for reducing the pressure inside the charging chamber to a level comparable to that of the evaporation chamber during the evaporation of the first crucible; a release step in which the first crucible is transferred to the charging chamber, a step of engagement of the second crucible with the evaporation chamber, and a step of setting evaporation conditions of the second crucible. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112301427-A |
| priorityDate | 2014-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.