Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_335a2020aa14e010b96c9c0b180b40f2 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S505-729 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G19-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02521 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02601 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B7-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4482 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B7-14 |
filingDate |
2013-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2017-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce29f4797f277ab47b9bca7d9f76bd96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4ed7cb223c5dcc6cf25c59a9b1f75a7 |
publicationDate |
2017-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-2865789-B1 |
titleOfInvention |
Method for producing oxide crystal thin film |
priorityDate |
2013-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |