| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2014-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a376539afdd209080008d481aad2ee95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_646a296935e70e6d967f4effba5bb71d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc6f1daf3fc3f3add847f8a459ccd55e |
| publicationDate |
2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2865727-B1 |
| titleOfInvention |
Barrier chemical mechanical planarisation // polishing composition and method of use thereof |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106244021-A |
| priorityDate |
2013-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |