Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98ec0629c8a506ce664ac51ffe289487 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2833-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-858 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2105-0061 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-3842 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2033-385 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2825-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2011-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2059-023 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-424 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C45-263 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-3878 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-85 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-3807 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D1-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29K105-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D1-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C45-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
filingDate |
2013-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_417cd1e3903ceaca016f787a814d4e34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bae346e449ea3587748672b06872e9ee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b57ee3cc64afb6282c90caa88da8e66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab6daaa6ae276c5c9b4f95a3ca579470 |
publicationDate |
2015-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-2842721-A1 |
titleOfInvention |
Method for producing mold for transferring fine pattern, method for producing substrate having uneven structure using same, and method for producing organic el element having said substrate having uneven structure |
abstract |
A mold for transferring a fine pattern, suitable for producing a substrate having a concave-convex structure such as a diffraction grating, can be provided by a simple process and with a high throughput. A method for producing a mold for transferring a fine pattern includes: a step of coating a surface of a base member with a solution containing a block copolymer and polyalkylene oxide; a solvent phase-separation step of phase-separating the block copolymer under a presence of vapor of an organic solvent so as to obtain a block copolymer film of the block copolymer, the block copolymer film having a concave-convex structure on a surface thereof and a horizontal cylinder structure in an interior thereof; a step of stacking a metal layer by electroforming; and a step of releasing the base member having the concave-convex structure formed thereon from the metal layer. |
priorityDate |
2012-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |