| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_070875329d2add3d65875c6c1b27108a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_142d981bd6c180968f769e0da8f620da |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02664 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-368 |
| filingDate |
2012-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0c938579384731e1e0a2b9d4d2ec2e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a800f27af95912c12a6c3b34d131310
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e251a5f1b06b10bb43059f580ac612d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29021c682a0956b1d0ff317c346c3b17 |
| publicationDate |
2015-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2840590-A1 |
| titleOfInvention |
Method for producing an oxide film using a low temperature process, an oxide film and an electronic device thereof |
| abstract |
Disclosed are a method for producing an oxide film using a low temperature process, an oxide film and an electronic device. The method for producing an oxide film according to an embodiment of the present invention includes the steps of coating a substrate with an oxide solution, and irradiating the oxide solution coat with ultraviolet rays under an inert gas atmosphere. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016020657-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112289926-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112289926-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107104184-A |
| priorityDate |
2012-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |