http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2818844-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60480587582bf8e0ca64c6076c0646ab |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31749 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3178 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3053 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-32 |
| filingDate | 2014-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff148072dc2389307740791da0b4e9ad |
| publicationDate | 2014-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2818844-A1 |
| titleOfInvention | Plan view sample preparation |
| abstract | A method and apparatus for altering the orientation of a charged particle beam sample is presented. Embodiments of the method includes providing a first work piece on a sample stage having a sample stage plane, the first work piece including a lamella plane in a first orientation. A sample is milled from the first work piece using an ion beam so that the sample is substantially free from the first work piece. A probe is attached to the sample, the probe including a shaft having a shaft axis, the shaft axis oriented at a shaft angle in relation to the sample stage plane, the shaft angle being non-normal to the sample stage plane. The probe is rotated about the shaft axis through a rotational angle so that the lamella plane is in a second orientation. The sample is attached to or placed on the sample on either the first work piece, the first work piece being the work piece from which the sample was milled, or on a second work piece, the second work piece being a work piece from which the sample was not milled. The sample is thinned using the ion beam to form a lamella, the lamella being oriented in the lamella plane. |
| priorityDate | 2013-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.