http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2786963-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035 |
| filingDate | 2012-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c36901e5bd3bf08a7121b516fbf894e7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_207afdf747ab3fa114a889ec1dab0ae6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e9e114c708efc63a7f69408b6f05faf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed27b573a47995dbd8248482bf19e285 |
| publicationDate | 2014-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2786963-A1 |
| titleOfInvention | Production method for polycrystalline silicon, and reactor for polycrystalline silicon production |
| abstract | The present invention provides a method of producing polycrystalline silicon in which silicon is precipitated on a silicon core wire to obtain a polycrystalline silicon rod. In an initial stage (former step) of a precipitation reaction, a reaction rate is not increased by supplying a large amount of source gas to a reactor but the reaction rate is increased by increasing a concentration of the source gas to be supplied, and in a latter step after the former step, the probability of occurrence of popcorn is reduced using an effect of high-speed forced convection caused by blowing the source gas into the reactor at high speed. Thus, a high-purity polycrystalline silicon rod with little popcorn can be produced without reducing production efficiency even in a reaction system with high pressure, high load, and high speed. |
| priorityDate | 2011-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.