| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00a421ab71bd49a451d0a49d23a082c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4e25cf4f18e08242621d2548501cc9d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_986d0ab29fa7910a46cd21a12d682fe4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32053 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0224 |
| filingDate |
2012-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4d675c70877865179d18011ba2ebb02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d486d0f962cd7d4dfedd61560f8b894
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6f22591e2f37fecb19b333b0e9c89b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c95d328f9890c7704d028d5094d7d576 |
| publicationDate |
2017-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2783396-B1 |
| titleOfInvention |
Method for forming metal silicide layers |
| priorityDate |
2011-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |