Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_646018b7183a929bbb6e26dcdb62a8da |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-706 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24421 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0175 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-708 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-721 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-361 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-767 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-85 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1131 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-963 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-788 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-587 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-0306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B18-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-583 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B37-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-584 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-15 |
filingDate |
2012-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2016-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e1a3e6c35c85b55de4c32273eba701a |
publicationDate |
2016-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-2767524-B1 |
titleOfInvention |
Silicon nitride substrate and method for manufacturing silicon nitride substrate |
priorityDate |
2011-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |