http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2762604-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5858f3a8fd92eec55e7647eb2c9f8992 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-546 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22 |
| filingDate | 2011-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bf0c74ea56213fae3351d40f59d9651 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ffedf812662b9babce8504ceb15b3a8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ac92f60194bcd422c1013e9d031ff59 |
| publicationDate | 2014-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2762604-A1 |
| titleOfInvention | Film forming method and film forming apparatus |
| abstract | A method for depositing a film is provided, which enables to deposit an oil repellent film having an enhanced abrasion resistance properties not to mention being good enough for practical use. A film deposition system 1, wherein a substrate holder 12 having a substrate holding surface for holding a plurality of substrates 14 is provided rotatably to inside a vacuum container 10, is configured to comprise an ion source 38 provided to inside the vacuum container 10 to have a configuration and in an arrangement and/or a direction, by which an ion beam can be irradiated only to a partial region of the substrate holding surface, and a deposition source 34 provided to inside the vacuum container 10 in an arrangement and a direction, so that a film deposition material of an oil repellent film can be supplied to the whole region of the substrate holding surface; wherein an operation of the ion source 38 is stopped before starting an operation of the deposition source 34. |
| priorityDate | 2011-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.