| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0388
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F30-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F30-08 |
| filingDate |
2012-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ac1c0682e388ed68326de296d9b2812
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f9e23ed712d92b69ae17bf44ae8875a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e763909b859cf74dc4e495eb1529bef |
| publicationDate |
2021-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2729844-B1 |
| titleOfInvention |
Lithographic patterning process and resists to use therein |
| priorityDate |
2011-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |