| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33b011e77b33662b8bf1f2ff2de7b661 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00842
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00853
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00783
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2418 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J17-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J17-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J17-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J11-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J11-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J11-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-0093
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B13-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J17-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J17-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-18 |
| filingDate |
2012-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf7071d9fa73acc28afc0a0662573f57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_434d32848a7a892fe6c78bc03ec8bcfc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea5b840c0940c761a6b64190b437897e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27fea150047a1fe9278bdad52c7691a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77b782b808d31dc96221403bdd808c2f |
| publicationDate |
2014-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2724358-A2 |
| titleOfInvention |
Arrays of metal and metal oxide microplasma devices with defect free oxide |
| abstract |
A microplasma device of the invention includes a microcavity (16) or microchannel (21, 30) defined at least partially within a thick metal oxide layer (10) consisting essentially of defect free oxide. Electrodes (12, 22a, 22b) are arranged with respect to the microcavity or microchannel to stimulate plasma generation in said microcavity or microchannel upon application of suitable voltage and at least one of the electrodes is encapsulated within the thick metal oxide layer. Large arrays can be formed and are highly robust as lack of microcracks in the oxide avoid dielectric breakdown. A method of fabricating a microcavity or microchannel plasma device of the invention includes anodizing a flat or gently curved or gently sloped metal substrate to form a thick layer of metal oxide consisting essentially of nanopores that are perpendicular to the surface of the metal substrate. Material removal is conducted to remove metal oxide material to form a microcavity or microchannel in the thick layer of metal oxide. Powder blasting is preferably used as an efficient removal process that preserves oxide quality. |
| priorityDate |
2011-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |