| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98a75c9fff239084cf3c988c59841957 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-52 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F17-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01F17-235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F17-235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2013-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5355b61940d8d3d8c1adf36b1bb7af62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cb91454c0c57a0f20418155fd538e6c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbc4e85e963216bd77e51338e2842080
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f456fca288d5d2bf0c6359131e3951e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_498e04b0e5dbb6c66d920801e21426ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68ed3be1d3eb6f0770f8379c380d8c0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_312805d062f8f4939493f6f399c78bc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6858dfc9f8ccf5dfe366eea52713428a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_418bd4977a2d4da4dc1c2c7ccaf447ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_380d5aa60108283b991a27aeacd9a525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73bfc6bcb6a1948e03bbd382858b254a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_769d6b8c26ccd50a1dc4c6b349989447 |
| publicationDate |
2021-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2722873-B1 |
| titleOfInvention |
Chemical mechanical polishing (cmp) composition for shallow trench isolation (sti) applications and methods of making thereof |
| priorityDate |
2012-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |