| abstract |
The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1 ), where A is a fused aromatic ring, B has a structure (2), and C is a hydroxybiphenyl of structure (3), (2) and (3) where R 1 is C 1 -C 4 alkyl and R 2 is C 1 -C 4 alkyl. The invention further relates to a process for forming an image using the composition. |