Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K8-528 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
filingDate |
2012-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2020-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28982cb9d17a6325514c4e90fb431d56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_086a9f7c640861abaca13d823d5fef86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7c06b538b57d4ecac4b9c24fd54b86d |
publicationDate |
2020-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-2663604-B1 |
titleOfInvention |
Metal-passivating cmp compositions and methods |
priorityDate |
2011-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |