| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cb7264799b02f0e99e8e16ee05ed0c4f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2900-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-058 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00793
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00896 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B1-34 |
| filingDate |
2012-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3923200b90a980ffdf65ca835f46e3d4 |
| publicationDate |
2013-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2650254-A1 |
| titleOfInvention |
Method for manufacturing a micro-nozzle |
| abstract |
A method for producing a micro nozzle from a composite of a silicon wafer (8) with a glass plate (9) applied thereto comprises the filling of microporous structures and / or channels with a filling compound formed between the silicon wafer (8) and the glass plate (9) Octadecanol, and subsequent sawing of the filled composite. The composite is placed on the edge of a holder (2) before sawing with the wafer side and heated by means of a on the holder (2) heating device (1) for melting the filling compound and then carried out a cooling process by means of the glass plate (9) led cooling gas , |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109354393-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109354393-B |
| priorityDate |
2012-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |