| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e221394359ebc8ef05b87c2093095274 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02466 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-54373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 |
| filingDate |
2011-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3273e1e4b8969ed2d1abab12ac960bf2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_696354dc825ac9f7e744775797eda33e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df7002ff8e378e24c717ef6487e40a75 |
| publicationDate |
2013-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2635900-A2 |
| titleOfInvention |
Miniaturized integrated micro electo-mechanical systems (mems) optical sensor array |
| abstract |
This invention describes a method and apparatus for actuation and multiplexed sensing using an array of sensing elements. The invention can be used for label- free detection of biological and chemical agents in a robust, miniaturized package. The invention integrates photonics, CMOS electronics, and Micro/Nano system technologies and allows multi-analyte sensing in the same package. The preferred actuation method is using magnetic thin films and preferred sensing method is optical using interference means. |
| priorityDate |
2010-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |