| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_730848fc69ca7afca2b3c3e10b6cfd92 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate |
2011-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bbd95fdce502f19fb814cee624a2e72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca0058a14cf35e26fb37b10ef81205c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dcdc4e00fcbe10a1ad5f1710cdab754 |
| publicationDate |
2013-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2605069-A1 |
| titleOfInvention |
Rinse liquid for lithography and method for forming pattern using same |
| abstract |
The present invention provides a rinse solution for lithography and a pattern formation method using the solution. They can improve prevention of both the pattern collapse and the melting at the same time. The solution contains water and a particular nitrogen-containing compound having an organic group, such as, alkyl amine or the like. The rinse solution may further contain a nonionic surfactant, if necessary. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2686737-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2686737-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11156920-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110023841-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110023841-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018095885-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9184057-B2 |
| priorityDate |
2010-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |