http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2596874-A1

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filingDate 2011-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2013-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-2596874-A1
titleOfInvention Method for producing gas barrier film
abstract Disclosed is a method for producing a gas barrier film, wherein a coating liquid containing a polysilazane is applied and a VUV treatment is carried out, and which prevents incorporation of a modification-inhibiting adsorbate into the coating film, thereby further improving the gas barrier performance. In the method for producing a gas barrier film, a coating film is formed by applying a coating liquid that contains a polysilazane over the surface of a film, and after having the resulting film pass through a drying zone, the film is irradiated with vacuum ultraviolet light from the coating film side and modified. The method for producing a gas barrier film is characterized in that an inert gas is supplied into the drying zone so that the oxygen concentration therein is 10% or less.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102020116246-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3795934-A1
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