| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cc29d9185498c9c1a576849d67f335a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eccd894c99fea2d1c0c8735872bb2309 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-773
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate |
2011-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e888ed12b4df784d8b1fcb6b998acbf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d33a8fe9085b781c5296b46f684e3463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37f227d70eb25532997ffa66307c4806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bba324cb97a15c8a8a7ba33361756a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdbcccea409c8b68c12e739f15a9bbd9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a03fe9f44089ac627adba413f1e0bdef |
| publicationDate |
2013-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2596081-A1 |
| titleOfInvention |
Cross-linking and multi-phase etch pastes for high resolution feature patterning |
| abstract |
The present invention relates to a novel etching media in the form of printable, homogeneous etching pastes with non-Newtonian flow properties for the improved etching of inorganic oxides and silicon surfaces and which allow to prepare smaller features. |
| priorityDate |
2010-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |