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publicationDate 2013-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-2575177-A2
titleOfInvention Manufacturing method of compound semiconductor device
abstract A passivation film is formed on a compound semiconductor layered structure, an electrode formation scheduled position for the passivation film is thinned by dry etching, a thinned portion of the passivation film is penetrated by wet etching to form an opening, and a gate electrode is formed on the passivation film so as to embed this opening by an electrode material.
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