| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3fc9711989b2c07e13453d9e6a734d3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022475
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022466 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0224 |
| filingDate |
2011-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2362a577d11160f4acd5ecc66a69f08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8a575f544d3118e210366709e9a4a45 |
| publicationDate |
2017-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2553149-B1 |
| titleOfInvention |
Method for etching conductive metal oxide layer using microelectrode |
| priorityDate |
2010-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |