| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_64841b88aa46719cebfe0134c01d1d47 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2506-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-09701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-09872
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-239
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-142 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-284 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29 |
| filingDate |
2011-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4eeb5c20053836bed110420f7cfa3c99
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f999d6344dc20114f5228e2b87f99bd2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd72b1eabf85acb968eab489042f4fce |
| publicationDate |
2012-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2525922-A1 |
| titleOfInvention |
Method for the application of a conformal nanocoating by means of a low pressure plasma process |
| abstract |
The invention relates to a conformal nanocoating applied by a low pressure plasma process. The invention also relates to a method for making such a conformal nanocoating on a three-dimensional nanostructure, in particular a three- dimensional structure containing electrically conductive and non-conductive elements. |
| priorityDate |
2010-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |