| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb823e72d0004ded507f810e2db46fb5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9b58386194d372d779e5db2478f53a8f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-513 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2010-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef0b4ca2f3e7a190f2e3d7734ccd9ec0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4f6cffd0fb69394e20969f285cd2e0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fa1af8fa223192563a9e2ae5154c6f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_228812aec9befdb4f568cb401487ce24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84b36bd0cb41889d27d56e6d514b49bd |
| publicationDate |
2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2507404-B1 |
| titleOfInvention |
Method and apparatus for depositing nanostructured thin layers with controlled morphology and nanostructure |
| priorityDate |
2009-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |