| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
2012-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77a3859d42c5414565a3144351d52a7e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8988942cd30373bb10a8671eb7c2316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5609cc41201c1746aaf0ba338d67026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d529f34bbf654f25487b67ec5e47938
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af768ef7f4654236b60fb18d88e31534
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c976cd4fa4872cb72576567b4689919 |
| publicationDate |
2012-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2492750-A1 |
| titleOfInvention |
Photoresist compositions and methods of forming photolithographic patterns |
| abstract |
Provided are photoresist compositions useful in forming photolithographic patterns. Also provided are substrates coated with the photoresist compositions and methods of forming photolithographic patterns. The compositions, methods and coated substrates find particular applicability in the manufacture of semiconductor devices. |
| priorityDate |
2011-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |