| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J1-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate |
2006-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5369646153f5fe6c0811dc44ada4f4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_415ba83a2dbec05e072e99aa8b8ac1f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af7e15d50b0a138bb8d3f93d69b963ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1564bcadfe7d9d1a11cb5fd4b07786a |
| publicationDate |
2016-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2488002-B1 |
| titleOfInvention |
Lpp euv light source drive laser system |
| priorityDate |
2005-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |