| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-26 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B1-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D17-049
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G07C3-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-162
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D17-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2004-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d5bbd9ee0c8c58b5788464f289435b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_290bfc64cfa09868069971ca40ac538c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7413380411c2530b1cb629a0aa70870
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce4a2a17c61e9b4f64ba1b0f1182d21a |
| publicationDate |
2014-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2481489-B1 |
| titleOfInvention |
Cleaning sheet, carrying member with a cleaning function and method of cleaning substrate processing equipment |
| priorityDate |
2003-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |