| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2010-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb3cc8c0232af7d6fba1fdf32fdc906a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72bd85bb533c902ad8f2ba6f22166e8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_208c69162ab320b2d72f7e6e87d9607e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cbd13e3cf2c2f2d8cfb43a236801787
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_851c6c8ab8ac08f4564bfc47ed734574 |
| publicationDate |
2020-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2478064-B1 |
| titleOfInvention |
Composition for polishing bulk silicon |
| priorityDate |
2009-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |