| abstract |
By forming a metal layer 14 on at least one of a connecting electrode 12 of a first substrate 10 and a connecting electrode 17 of a second substrate 15, placing the first substrate 10 and the second substrate 15 together in order that the connecting electrode 12 of the first substrate 10 and the connecting electrode 17 of the second substrate 15 face opposite to each other via the metal layer 14, increasing temperature up to anodic bonding temperature, and applying DC voltage between the first substrate 10 and the second substrate 15 while maintaining that temperature, the first substrate 10 and the second substrate 15 are anodically bonded, and at the same time by melting the metal layer 14, the connecting electrode 12 of the first substrate 10 and the connecting electrode 17 of the second substrate 15 are electrically connected. The method achieves anodic bonding of a plurality of substrates with high yield and at the same time establishes wiring connection, which is effective for packaging, etc. |