| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0353
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-012
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-2426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00246 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125 |
| filingDate |
2011-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34acee800a2d7261bf25d41651ee9365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9875178bf3907a9c33e0c7df9a8d7e86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be47fa46da130187d553bb7e99e74729
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cfc81411a2fe4137ef18cce9a2da061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5d995645879e90ba9f8580d439eeab3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bcfa2c8b2fb0e3148e53dc3e552e729
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee7992cf7f3eb3c339ab98459c53bb69 |
| publicationDate |
2012-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2428487-A1 |
| titleOfInvention |
Integrated circuit comprising a device with a vertical mobile element integrated in a supporting substrate and method for manufacturing the device with a mobile element |
| abstract |
The integrated circuit comprises a support substrate (1) having opposite first and second main faces (2a, 2b). A cavity passes through the support substrate (1) and connects the first and second main faces (2a, 2b). The integrated circuit includes a movable element device (5) whose movable element (6) and a pair of associated electrodes (7) are included in a cavity. An anchor node of the movable member (6) is located at the first main face (2a). The integrated circuit comprises a first elementary chip (3) disposed at the first major face (2a) and electrically connected to the moving element device (5). |
| priorityDate |
2010-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |