| abstract |
A composition comprising, for 100% of its total mass, at least 97% of an aluminium precursor of formula: Al(R 1 ) 2 (OR 2 ) with R 1 and R 2 independently selected in the group consisting of methyl, ethyl, propyl, isopropyl and t-butyl; and : n- From 200 ppb to 5 ppm of Mo (Molybdenum); n- From 1000 ppb to 5 ppm of Fe (Iron); n- From 200 ppb to 5 ppm of Cu (Copper); n- From 200 ppb to 5 ppm of Ta (Tantalum). |