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filingDate 2010-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85b8224704029d7cfae0468f5eea015b
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publicationDate 2012-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-2402293-A1
titleOfInvention Process for producing porous quartz glass object, and optical member for euv lithography
abstract The present invention relates to a process for producing a porous quartz glass body containing hydrolyzing a metal dopant precursor and an SiO 2 precursor in a flame of a burner to form glass fine particles, and depositing and growing the formed glass fine particles on a base material, in which the burner has at least two nozzles, and in which a mixed gas containing (A) a metal dopant precursor gas, (B) an SiO 2 precursor gas, (C) one gas of H 2 and O 2 , and (D) one or more gases selected from the group consisting of a rare gas, N 2 , CO 2 , a hydrogen halide and H 2 O, with a proportion of the gas (D) being from 5 to 70 mol%; and (E) the other gas of H 2 and O 2 of (C), are fed into different nozzles of the burner from each other.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103941539-A
priorityDate 2009-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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