http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2356177-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_730848fc69ca7afca2b3c3e10b6cfd92 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-342 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D161-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D145-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D161-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate | 2009-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_526ef3dee706861f08a32fb49b1c3e87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_280f8740a51755ee1342f9add341b514 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cb96090b9ac9b8ef92a595c4f094fc3 |
| publicationDate | 2011-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2356177-A1 |
| titleOfInvention | An antireflective coating composition comprising fused aromatic rings |
| abstract | The present invention relates to an organic spin coatable antireflective coating composition comprising with (i) at least one unit with fused aromatic rings in the backbone of the polymer of structure (1 ), (ii) at least one aromatic unit ring in the backbone of the polymer of structure (2) where the aromatic ring has a pendant alkylene(fusedaromatic) group and a pendant hydroxy group, and, (iii) at least one unit with an aliphatic moiety in the backbone of the polymer of structure (3). where, Fr 1 is a substituted or unsubstituted fused aromatic ring moiety with 3 or more fused aromatic rings, Fr 2 is a fused aromatic ring moiety with 2 or more fused aromatic rings, Ar is a substituted or unsubstituted aromatic ring moiety, R' and R" are independently selected from hydrogen and C 1 -C 4 alkyl, y=1-4, and B is a substituted or unsubstituted aliphatic moiety, and R 1 is selected from hydrogen or aromatic moiety. The invention further relates to a process for imaging the present composition. |
| priorityDate | 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 370.