http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2347304-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3a62c92e56568bd104089aac22ca487b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate | 2009-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2f948a27995bf21fb497db3b77990ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b544ac9ccc839abdaaba64cf30f86f4 |
| publicationDate | 2011-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2347304-A1 |
| titleOfInvention | Methods for performing photolithography using barcs having graded optical properties |
| abstract | Photolithography methods using BARCs having graded optical properties are provided. In an exemplary embodiment, a photolithography method comprises the steps of depositing a BARC overlying a material to be patterned, the BARC having a refractive index and an absorbance. The BARC is modified such that, after the step of modifying, values of the refractive index and the absorbance are graded from first values at a first surface of the BARC to second values at a second surface of the BARC. The step of modifying is performed after the step of depositing. |
| priorityDate | 2008-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.