http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2330738-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_84e4b23b7baa86e0222bb4c948ef7292 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2009-02314 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-2426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02259 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-2447 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-2473 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-24 |
| filingDate | 2009-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75f17c18dc3706c5f2e1278ca9787a89 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b66eee209c76c59c4125cc3cb4e0f6c2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fabbe5f362086ff688f9a5d29982f75 |
| publicationDate | 2011-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2330738-A1 |
| titleOfInvention | MEMS resonator with transistor and oscillator comprising such a resonator |
| abstract | The transistor MEMS resonator comprises: a well in which is formed a conduction element consisting of a source region (308), a drain region (309), and a semiconductor region forming a channel connecting the source region and the drain region; - A vibrating structure (310) integral with a substrate while being free to vibrate; a fixed structure (330) carried by the substrate, a space (or gap) being arranged between the fixed structure and the vibrating structure; the box being integrated either in the vibrating structure or in the fixed structure (330), so that the channel extends opposite said space, and said space contains a microstructure (328) of a piezoelectric material provided to ensure an electromechanical coupling between the vibrating structure (310) and the channel so as to make it possible to modulate the conductivity of the conduction element at the vibration frequency of the vibrating structure. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10483875-B2 |
| priorityDate | 2009-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10633 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136169249 |
Total number of triples: 21.