http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2325351-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cefdefe184a35be71bd303fdb90d4ddf |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0245 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 |
| filingDate | 2010-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9e8d8cb83794a92c6becc08b0dfd996 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec7300695d4db255af6a3e828803bc37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db5c40ba7ad607b772e7c1e55d9eb403 |
| publicationDate | 2011-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2325351-A1 |
| titleOfInvention | Method and device for coating a metallic substrate surface of a workpiece with a material coating attached by means of an ALD process |
| abstract | The invention relates to a method and a device for coating a metallic substrate surface with a material layer applied by an ALD process.n n n According to the invention, the metallic substrate surface to be coated is subjected to at least two-stage plasma pretreatment in a first process chamber (10) of the device (1) before the application of the material layer which takes place in a second process chamber (20) of the device (1) wherein, in a first stage of the two-stage plasma pretreatment, a reduction of the substrate surface with a reducing plasma and then in a second stage an oxidation of the substrate surface to be coated with an oxidizing plasma is performed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016007065-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012168248-A1 |
| priorityDate | 2009-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.