| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a162b65402a9a79580e3ae31dcbf3fa |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31616 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-80 |
| filingDate |
2007-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8efb42cae180c8086a5dfb31375136b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a667c0ad2a58b6eeb4c0fe761098eb6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac29278ad878b42ddfaed10c8ade61ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb7ccaba06555c0ced1f3c8d1b6c2d68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16ec50b0e624240565048533d3abd364
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfa8556ca4434b6e359b219764551bcd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edc848332537fa7b2ef978dcc1e95184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06f5713a173f6b04824ffa02562a95dd |
| publicationDate |
2013-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2312392-B1 |
| titleOfInvention |
Photomask blank and photomask |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106406022-A |
| priorityDate |
2006-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |